Newsletter
AIR POLLUTION CONTROL AND EMISSION STANDARDS FOR THE SEMICONDUCTOR INDUSTRY
The Environmental Protection Administration has recently promulgated the Air Pollution Control and Emission Standards for the Semiconductor Industry. Air pollutants produced by semiconductor manufacturers should be channeled by an airtight exhaust system into pollution treatment equipment. Pollutants must be treated and conform to the following emission standards prior to emission.
Existing semiconductor manufacturers established prior to promulgation of the standards should submit a pollution control plan to the central government authority within three months of the promulgation date, and should be in compliance with the standards by 1 July 2000.